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  • LiNbO 3 grating couplers fabricated by one excimer laser pulse through a diffractive optical element

    • 摘要:

      One excimer laser pulse through a silicon glass phase mask was used to directly generate periodic surface structures on top of a lithium niobate (LN) wafer. The surface corrugations have a period that is the same as that of the mask grating. Measurement of the grating coupler with a He-Ne laser beam coupling into the waveguide found three mode of incident lights transmitting into the waveguide.

    • 作者:

      Luo Gui peng;Wang Mu;Zhu Shi ning;Liu Zhi guo;Lu Yan qing;Chen Xiao yuan;Ge Chuan zhe;Ming Nai ben;Wu Hai ming;Lu Zhu hong

    • 刊名:

      Pacific Rim Conference on Lasers and Electro Optics CLEO Technical Digest

    • 在线出版时间:

      1997