One excimer laser pulse through a silicon glass phase mask was used to directly generate periodic surface structures on top of a lithium niobate (LN) wafer. The surface corrugations have a period that is the same as that of the mask grating. Measurement of the grating coupler with a He-Ne laser beam coupling into the waveguide found three mode of incident lights transmitting into the waveguide.
Luo Gui peng;Wang Mu;Zhu Shi ning;Liu Zhi guo;Lu Yan qing;Chen Xiao yuan;Ge Chuan zhe;Ming Nai ben;Wu Hai ming;Lu Zhu hong
Pacific Rim Conference on Lasers and Electro Optics CLEO Technical Digest